Manufacturing processes in the semiconductor industry requires ultrapure water at nearly every phase. Treating intake water to high quality levels requires processes and water treatment technologies to remove contaminants, minerals, microorganisms, and trace organic and nonorganic chemicals. Simply meeting today's water quality demands is not good enough and Evoqua understands that the next technology cycle will call for even more rigorous specifications that add to the cost of every chip produced. Our extensive portfolio of technologies can address the three steps of an ultrapure water system; Makeup, Primary and Polishing systems.
Ultrapure Water
Meet ASTM & SEMI standards for the semiconductor industry
Products & Services

Packaged High Purity Water Systems
VANOX® Point-of-Use Filtration System
A compact, ultra clean, point of use filtration system to remove particles from water feeding the critical clean tools used for semiconductor fabrication

Service Deionization (SDI)
Service Deionization (SDI) Systems
Water purification through service deionization

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